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F05500 - SEMI F55 - Test Method for Determining the Corrosion Resistance of Mass Flow Controllers Revision:SEMI F55-1218 - Current SEMI E132-1214 (technical revision)

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Description

SEMI E132-1214 (technical revision)

Background and description of an approach to understanding data quality and associated terminology

SEMI E30-0423 (technical revision)

種々の融着継手設計や製造者における比較のために本方法を使用する場合には,ユーザは評価されるべきチューブや融着継手を明確に選択しなければならない。

本文書の目的は,サーマル・マスフローコントローラの電磁感受性の評価および試験のための体系的方法を定めることである。

F05500 - SEMI F55 - Test Method for Determining the Corrosion Resistance of Mass Flow Controllers Revision:SEMI F55-1218 - Current SEMI E132-1214 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 6, 2018. Available at www. semiviews. org and www. semi. org in December 2018; originally published June 2000; previously published April 2012. A mass flow controller (MFC) is often used to control corrosive gases under unfavorable conditions. This Test Method is intended to

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